Product information
We provide structural ceramics that are used as precision parts and functional parts in devices for semiconductor and liquid crystal manufacturing, and as abrasion-resistant parts in crushers and similar machinery.
Products and Services
NTK CERATEC meets your needs, from material development to processing, by employing our advanced technologies and ensuring reliable quality.Wafer chuck
Wafer chucks, which are essential for semiconductor manufacturing, can be provided in various specifications.Phosphor plate
We provide the world's only dispersed phosphor heat-resistant plates for LED/LD. The colors and sizes can be adjusted according to customer needs.Thermal spraying
We make ceramic spraying films for enhanced resistance against abrasion, corrosion, and plasma. Integrated manufacturing can be achieved with ceramic substrates.-
Regeneration
Our wealth of experience, proprietary cleaning know-how, and repair technologies are all at your service. Ceramic products
We can manufacture products from a diversity of materials according to your specifications. We have ready-made products available.
Ceramic materials
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小ロットからでもご対応可能です。
Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
||
---|---|---|---|---|---|---|---|
Alumina(Al2O3) | Standard product | A995 | 3.9 | 380 | 410 | 17 | 5 |
Alumina(Al2O3) | Thermal shock residence type | A995S | 3.9 | 370 | 230 | 15 | - |
Zirconia(ZrO2) | Standard product | AYZ-3 | 6.0 | 200 | 1000 | 13 | 6 |
Silicon carbide(SiC) | Standard product | N-Type | 3.1 | 410 | 500 | 24 | 3 |
Silicon nitride(Si3N4) | Standard product | ASN-5 | 3.2 | 290 | 720 | 14 | 5 |
Aluminum nitride(AlN) | Standard product | N-Type | 3.3 | 320 | 350 | 13 | 3 |
Low thermal expansion insulating ceramics | Adceram-CS® | D3 | 2.3 | 90 | 150 | 4.5 | 2 |
Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
||
---|---|---|---|---|---|---|---|---|---|
Alumina(Al2O3) | Standard product | A995 | 7.6 | - | 30 | >1014 | 14 | 10 | <300 |
Alumina(Al2O3) | Low-dielectric loss type | A995LD | 7.3 | - | 28 | >1014 | 15 | 10 | <5 |
Alumina(Al2O3) | Thermal shock residence type | A995S | 7.1 | 500 | 30 | >1014 | - | 10 | <300 |
Zirconia(ZrO2) | Standard product | AYZ-3 | 10 | 280 | 3 | 1012 | >10 | 35 | 20 |
Silicon carbide(SiC) | Standard product | N-Type | 4.6 | 450 | 170 | 106 | - | - | - |
Silicon nitride(Si3N4) | Standard product | ASN-5 | 2.3 | 700 | 26 | >1014 | >10 | 8 | 3 |
Aluminum nitride(AlN) | Standard product | N-Type | 4.0 | 400 | 160 | 1014 | >15 | 9 | 10 |
Zero thermal expansion Pore Free ceramics | ZPF | N-Type | - | - | 5 | 1012 | - | - | - |
Low thermal expansion insulating ceramics | Adceram-CS® | D3 | 0.9 | 700 | 1.3 | 1010 | 20 | 7.5 | 35 |
Machinable ceramics Macor® | Macor® | - | 9.3 | 150 | 1.7 | 1016 | 40 | 6 | 50 |