Alumina（Al2O3）
Alumina is one of the most popular materials for fine ceramics, with relatively low manufacturing costs.
It is used mainly for structural and abrasion-resistant material due to its excellent electrical insulation properties and chemical stability.
Product Lineup Chart
| Type | Characteristics | Characteristics | Usage |
|---|---|---|---|
| Standard product | Large shape allowed Relatively inexpensive |
A995 | ・Members for various semiconductor manufacturing devices ・Large components for various liquid crystal devices ・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher |
| Low-dielectric loss type | Low-dielectric loss | A995LD | ・Plasma devices for semiconductor manufacturing |
| Thermal shock residence type | Thermal shock residence High toughness |
A995S | ・Carrier parts for heat-treating process ・Heater peripheral members |
| High-purity type | High-purity Pore-free |
AJPF | ・Plasma devices for semiconductor manufacturing |
Characteristics Chart
Mechanical characteristics:
| Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
|
|---|---|---|---|---|---|---|
| Standard product | A995 | 3.9 | 380 | 450 | 16 | 4 |
| Low-dielectric loss type | A995LD | 3.9 | 380 | 360 | 15 | 4 |
| Thermal shock residence type | A995S | 3.9 | 370 | 230 | 15 | - |
| High-purity type | AJPF | 4.0 | 400 | 550 | 20 | 3 |
Heat/electrical characteristics
| Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
|
|---|---|---|---|---|---|---|---|---|
| Standard product | A995 | 7.3 | 200 | 30 | >1014 | 12 | 10 | <300 |
| Low-dielectric loss type | A995LD | 7.5 | 200 | 30 | >1014 | 12 | 10 | <5 |
| Thermal shock residence type | A995S | 7.1 | 500 | 30 | >1014 | - | 10 | <300 |
| High-purity type | AJPF | 7.7 | 200 | 35 | >1014 | 12 | 10 | 1 |
Usage
- Members for semiconductor manufacturing equipment
- Plasma-resistant components
- Large components for liquid crystal equipment
- Vacuum chuck
- Large abrasion-resistant components for powder handling equipment
- Electrostatic chuck
- Spherical balls (check valves of pumps, etc.)
- Mechanical seal
- Others
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