Alumina(Al2O3)
Alumina is one of the most popular materials for fine ceramics, with relatively low manufacturing costs.
It is used mainly for structural and abrasion-resistant material due to its excellent electrical insulation properties and chemical stability.
Product Lineup Chart
Type | Characteristics | Characteristics | Usage |
---|---|---|---|
Standard product | Large shape allowed Relatively inexpensive |
A995 | ・Members for various semiconductor manufacturing devices ・Large components for various liquid crystal devices ・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher |
Low-dielectric loss type | Low-dielectric loss | A995LD | ・Plasma devices for semiconductor manufacturing |
Thermal shock residence type | Thermal shock residence High toughness |
A995S | ・Carrier parts for heat-treating process ・Heater peripheral members |
High-purity type | High-purity Pore-free |
AJPF | ・Plasma devices for semiconductor manufacturing |
Usage
- Members for semiconductor manufacturing equipment
- Plasma-resistant components
- Large components for liquid crystal equipment
- Vacuum chuck
- Large abrasion-resistant components for powder handling equipment
- Electrostatic chuck
- Spherical balls (check valves of pumps, etc.)
- Mechanical seal
- Others