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Alumina(Al2O3

Alumina is one of the most popular materials for fine ceramics, with relatively low manufacturing costs.
It is used mainly for structural and abrasion-resistant material due to its excellent electrical insulation properties and chemical stability.

Product Lineup Chart

Type Characteristics Characteristics Usage
Standard product Large shape allowed
Relatively inexpensive
A995 ・Members for various semiconductor manufacturing devices
・Large components for various liquid crystal devices
・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher
Low-dielectric loss type Low-dielectric loss A995LD ・Plasma devices for semiconductor manufacturing
Thermal shock residence type Thermal shock residence
High toughness
A995S ・Carrier parts for heat-treating process
・Heater peripheral members
High-purity type High-purity
Pore-free
AJPF ・Plasma devices for semiconductor manufacturing

Usage

  • Members for semiconductor manufacturing equipment
  • Plasma-resistant components
  • Large components for liquid crystal equipment
  • Vacuum chuck
  • Large abrasion-resistant components for powder handling equipment
  • Electrostatic chuck
  • Spherical balls (check valves of pumps, etc.)
  • Mechanical seal
  • Others

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