Alumina（Al2O3） Low-dielectric loss type
A995LD is an alumina based material with stably-maintained low dielectric loss which solves the following problems on devices using plasma (CVD, etcher, etc.):
- ・need for high output to increase rate;
- ・output rates differ by equipment;
- ・troublesome tuning; and
- ・inhomogeneous plasma.
Characteristics (Value)
Electrical characteristics
Comparison between standard alumina material and A995LD
Usage
Possible factors causing unstable plasma are high or unstable dielectric loss of ceramic members.
A995LD with ceramic stably-maintained low dielectric loss can improve equipment performance in terms of:
- electric power saving due to reduced power loss;
- rate stabilization;
- tuning work saving; and
- plasma dispersion prevention.
Product Lineup Chart
| Type | Characteristics | Characteristics | Usage |
|---|---|---|---|
| Standard product | Large shape allowed Relatively inexpensive |
A995 | ・Members for various semiconductor manufacturing devices ・Large components for various liquid crystal devices ・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher |
| Low-dielectric loss type | Low-dielectric loss | A995LD | ・Plasma devices for semiconductor manufacturing |
| Thermal shock residence type | Thermal shock residence High toughness |
A995S | ・Carrier parts for heat-treating process ・Heater peripheral members |
| High-purity type | High-purity Pore-free |
AJPF | ・Plasma devices for semiconductor manufacturing |
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