Silicon carbide（SiC）
Silicon carbide is an artificial mineral with high covalent bond, greater strength than alumina and silicon nitride, and particularly high sliding abrasion resistance. It can maintain high strength in high temperatures and has excellent corrosion resistance.
Characteristics Chart
Mechanical characteristics:
| Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
|
|---|---|---|---|---|---|---|
| Standard product | N-Type | 3.1 | 410 | 500 | 24 | 3 |
Heat/electrical characteristics
| Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
|
|---|---|---|---|---|---|---|---|---|
| Standard product | N-Type | 4.6 | 450 | 170 | 106 | - | - | - |
Usage
- Members for semiconductor manufacturing equipment
- Vacuum chuck
- Mechanical seal
- Several abrasion resistant and sliding components
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