Aluminum nitride（AlN）
Aluminum nitride has a high coefficient of thermal conductivity and high electrical insulation. It is widely used for components of semiconductor manufacturing equipment due to a coefficient of thermal conductivity close to Si.
Characteristics Chart
Mechanical characteristics:
| Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
|
|---|---|---|---|---|---|---|
| Standard product | N-Type | 3.3 | 320 | 350 | 13 | 3 |
Heat/electrical characteristics
| Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
|
|---|---|---|---|---|---|---|---|---|
| Standard product | N-Type | 4.0 | 400 | 160 | 1014 | >15 | 9 | 10 |
Usage
- Members for semiconductor manufacturing equipment
- Electrostatic chucks
- Heaters
- Radiator plates
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