Refurbishment

We restore wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.

In wafer chuck production, film formation and etching process are affected by the deterioration of temperature distribution on wafers caused by: degradation of planar property due to abrasion as well as joining layers due to corrosive gas; and change in the He gas cooling effect due to these degradations.
Vast experience and processing technologies of NTK CERATEC enables expensive chuck products to be used for a long period, contributing to significant cost savings.