Alumina（Al2O3） Thermal shock residence type
A995S is an alumina based material with improved thermal shock resistance that achieves thermal shock resistance of ⊿T 500°C, 2.5 times higher than conventional products, ⊿T 200°C.
Type S high thermal shock resistance alumina ceramics achieve significant reductions in production costs, replacing silicon nitride or silicon carbide conventionally used in high temperature environments characterized by rapid cooling and heating.
Characteristics (Value)
Characteristics
- Usable in an oxidation atmosphere;
- Cost almost equal to general high purity alumina (depending on shape of product); and）
- Suitable for use on large equipment, complex shapes and high-precision, where silicon nitride or silicon carbide cannot be used.
Comparison between A995S and other materials
| Product number | Density g/cm3 | Coefficient of elasticity GPa | Bending strength MPa | Coefficient of thermal expansion ×10-6/K | Thermal shock resistance K | Coefficient of thermal conductivity W/m・K | Cost effectiveness | |
|---|---|---|---|---|---|---|---|---|
| Alumina Standard product | A995 | 3.9 | 380 | 410 | 7.6 | - | 30 | ◎ |
| Alumina Thermal shock residence type | A995S | 3.9 | 370 | 230 | 7.1 | 500 | 30 | ◎ |
| Silicon carbide | 3.1 | 410 | 500 | 4.6 | 450 | 170 | △ | |
| Silicon nitride | ASN-5 | 3.2 | 290 | 720 | 2.3 | 700 | 26 | △ |
Usage
- Peripheral components of high temperature equipment such as heater panels
- Conveying members in heat-treating processes
- Components inside microwave plasma chambers
Product Lineup Chart
| Type | Characteristics | Characteristics | Usage |
|---|---|---|---|
| Standard product | Large shape allowed Relatively inexpensive |
A995 | ・Members for various semiconductor manufacturing devices ・Large components for various liquid crystal devices ・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher |
| Low-dielectric loss type | Low-dielectric loss | A995LD | ・Plasma devices for semiconductor manufacturing |
| Thermal shock residence type | Thermal shock residence High toughness |
A995S | ・Carrier parts for heat-treating process ・Heater peripheral members |
| High-purity type | High-purity Pore-free |
AJPF | ・Plasma devices for semiconductor manufacturing |
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