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Aluminum nitride(AlN)

Aluminum nitride has a high coefficient of thermal conductivity and high electrical insulation. It is widely used for components of semiconductor manufacturing equipment due to a coefficient of thermal conductivity close to Si.

Characteristics Chart

Mechanical characteristics:

  Characteristics Density
g/cm3
Coefficient of elasticity
GPa
Bending strength
MPa
Hardness
GPa
Fracture toughness
MPa√m
Standard product N-Type 3.3 320 350 13 3

Heat/electrical characteristics

Characteristics Coefficient of thermal expansion
×10-6/K
Thermal shock resistance
K
Coefficient of thermal conductivity
W/m・K
Electrical resistance
Ω・cm
Dielectric strength
kV/mm
Dielectric constant Dielectric loss
×10-4
Standard product N-Type 4.0 400 160 1014 >15 9 10

Usage

  • Members for semiconductor manufacturing equipment
  • Electrostatic chucks
  • Heaters
  • Radiator plates

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