Machinable ceramics Macor®
Macor® is the registered trademark of Corning Inc.
As Macor is a free-machining ceramic material, it can be manufactured faster than general ceramics. It is glass ceramic with high electric insulating, heat resistance and heat insulating properties that can easily be processed using precision machining without using diamond tools.
Characteristics Chart
Mechanical characteristics:
| Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
|
|---|---|---|---|---|---|---|
| Macor® | - | 2.5 | 67 | 130 | - | - |
Heat/electrical characteristics
| Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
|
|---|---|---|---|---|---|---|---|---|
| Macor® | - | 9.3 | 150 | 1.7 | 1016 | 40 | 6 | 50 |
Usage
- Members for semiconductor manufacturing equipment
- Large components for liquid crystal equipment
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