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Vacuum chuck
Electrostatic chuck
Porous chuck
Phosphor Plate
Ceramics Coating
Refurbishment
Ceramic(materials)
Alumina(Al
2
O
3
)/Standard product
Alumina(Al
2
O
3
)/Low-dielectric loss type
Alumina(Al
2
O
3
)/Thermal shock residence type
Zirconia(ZrO
2
)/Standard product
Silicon carbide(SiC)/Standard product
Silicon nitride(Si
3
N
4
)/Standard product
Aluminum nitride(AlN)/Standard product
Zero thermal expansion Pore Free ceramics(ZPF)
Low thermal expansion insulating ceramics/Adceram-CS
®
Machinable ceramics Macor
®
Ceramic characteristic comparison table[PDF]
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