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•Piezoceramic positioner
Laminated multilayer piezoceramic element is used for this application in direction of stacking.
High reliability due to metal can structure is suitable for ultra-precise positioning device and mass flow controller application. We also supply its driver. |
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| •Piezo Driver (Power supply designed for the above positioner) |
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| •NAPS (Controller for ultra-precise positioning application) |
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| •Bimorph actuator |
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| •Precise Z-axis positioning system |
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Nihon Ceratec developed new Z-axis positioning system that has high reliability and resolution better than 5 nm. This can be used in various applications, for example, microscope with auto focus function.
Application
•Auto focus for microscope
•Precise test system for semiconductor
•Precise test system for optical storage |
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