<<< Select >>> Main Products Top    Ceramics products       Fine Ceramic Material       Ultraprecise Vacuum Chuck       Electrostatic Chuck       Porous Chuck       ZPF(Zero Expansion Stiffness Ceramics) ZPF is revolutionary ceramics that has zero expansion characteristics same as Low-Expansion-Recrystallized glass with high stiffness like ceramic material. Application •Mirror for laser interference •Electrostatic Chuck •Parts of XY stage ZPF ZPF(Zero Expansion Stiffness Ceramics)(PDF:145KB)