Nihon Ceratec's excellent material technology enables state-of-the-art ESC
suited for each customer's demand. We offer ESCs used in plasma condition, electron beam condition,
or low expansion application from the R&D stage.
Application
•ESC with heater used for plasma application
•Non- magnetism ESC for electron beam application
•Ceramic coated ESC for large and special glass substrate |
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| Cross section model of spray coat type ESC |
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