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Electrostatic Chuck

Nihon Ceratec's excellent material technology enables state-of-the-art Electrostatic Chuck(ESC) suited to each customer's demand. We offer ESCs used in plasma condition, electron beam condition, or low expansion applications from the R&D stage and beyond.

•ESC with heater used for plasma application
•Non- magnetism ESC for electron beam application
•Ceramic coated ESC for large and special glass substrate
Cross section model of spray coat type ESC
Electrostatic Chuck (PDF:153KB)
Ceramic products
Coating&Cleaning  technology
Piezoelectric ceramics
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