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Ultraprecise Vacuum Chuck

Dia.300mm wafer Laser interference measurement data
(Reference)
Nihon Ceratec produces state-of-the-art precise Vacuum Chucks with ultimate level of flatness and smoothness made of PoreFree Ceramics.
Vacuum Chuck is designed for each various type wafer and its smoothness is proved in mainstream 12" wafer.

Application
•Vacuum chuck of Wafer tester
•Fixture for processing machine

Ultraprecise Vacuum Chuck (PDF:165KB)
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