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| Various ceramic materials are available; Alumina, Zirconia, Silicon nitride, Silicon
carbide, Porefree® etc. |
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| Alumina |
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Zirconia |
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Silicon nitride |
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Silicon carbide |
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Porefree® |
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Application
•Parts for semiconductor equipments
Vacuum Chuck, Electrostatic Chuck, End Effector, Clamp Ring, various parts with anti-plasma property
•Large anti-abrasive parts for powder process equipment
•Perfect sphere ball(High purity alumina, Zirconia, etc.):check valve for pump
•Heat-resisting parts•Ultra precise parts•Large parts•Mechanical seal•etc. |
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