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Alumina(Al2O3) Low-dielectric loss type

A995LD is an alumina based material with stably-maintained low dielectric loss which solves the following problems on devices using plasma (CVD, etcher, etc.):
  • ・need for high output to increase rate;
  • ・output rates differ by equipment;
  • ・troublesome tuning; and
  • ・inhomogeneous plasma.

Characteristics (Value)

Electrical characteristics

Comparison between standard alumina material and A995LD

Characteristics Chart

Mechanical characteristics:

  Characteristics Density
g/cm3
Coefficient of elasticity
GPa
Bending strength
MPa
Hardness
GPa
Fracture toughness
MPa√m
Standard product A995 3.9 380 450 16 4
Low-dielectric loss type A995LD 3.9 380 360 15 4
Thermal shock residence type A995S 3.9 370 230 15 -
High-purity type AJPF 4.0 400 550 20 3

Heat/electrical characteristics

Characteristics Coefficient of thermal expansion
×10-6/K
Thermal shock resistance
K
Coefficient of thermal conductivity
W/m・K
Electrical resistance
Ω・cm
Dielectric strength
kV/mm
Dielectric constant Dielectric loss
×10-4
Standard product A995 7.3 200 30 >1014 12 10 <300
Low-dielectric loss type A995LD 7.5 200 30 >1014 12 10 <5
Thermal shock residence type A995S 7.1 500 30 >1014 - 10 <300
High-purity type AJPF 7.7 200 35 >1014 12 10 1

Usage

Possible factors causing unstable plasma are high or unstable dielectric loss of ceramic members. A995LD with ceramic stably-maintained low dielectric loss can improve equipment performance in terms of:
  • electric power saving due to reduced power loss;
  • rate stabilization;
  • tuning work saving; and
  • plasma dispersion prevention.

Product Lineup Chart

Type Characteristics Characteristics Usage
Standard product Large shape allowed
Relatively inexpensive
A995 ・Members for various semiconductor manufacturing devices
・Large components for various liquid crystal devices
・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher
Low-dielectric loss type Low-dielectric loss A995LD ・Plasma devices for semiconductor manufacturing
Thermal shock residence type Thermal shock residence
High toughness
A995S ・Carrier parts for heat-treating process
・Heater peripheral members
High-purity type High-purity
Pore-free
AJPF ・Plasma devices for semiconductor manufacturing

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