Alumina(Al2O3) Low-dielectric loss type
A995LD is an alumina based material with stably-maintained low dielectric loss which solves the following problems on devices using plasma (CVD, etcher, etc.):
- ・need for high output to increase rate;
- ・output rates differ by equipment;
- ・troublesome tuning; and
- ・inhomogeneous plasma.
Characteristics (Value)
Characteristics Chart
Mechanical characteristics:
Characteristics | Density g/cm3 |
Coefficient of elasticity GPa |
Bending strength MPa |
Hardness GPa |
Fracture toughness MPa√m |
|
---|---|---|---|---|---|---|
Standard product | A995 | 3.9 | 380 | 450 | 16 | 4 |
Low-dielectric loss type | A995LD | 3.9 | 380 | 360 | 15 | 4 |
Thermal shock residence type | A995S | 3.9 | 370 | 230 | 15 | - |
High-purity type | AJPF | 4.0 | 400 | 550 | 20 | 3 |
Heat/electrical characteristics
Characteristics | Coefficient of thermal expansion ×10-6/K |
Thermal shock resistance K |
Coefficient of thermal conductivity W/m・K |
Electrical resistance Ω・cm |
Dielectric strength kV/mm |
Dielectric constant | Dielectric loss ×10-4 |
|
---|---|---|---|---|---|---|---|---|
Standard product | A995 | 7.3 | 200 | 30 | >1014 | 12 | 10 | <300 |
Low-dielectric loss type | A995LD | 7.5 | 200 | 30 | >1014 | 12 | 10 | <5 |
Thermal shock residence type | A995S | 7.1 | 500 | 30 | >1014 | - | 10 | <300 |
High-purity type | AJPF | 7.7 | 200 | 35 | >1014 | 12 | 10 | 1 |
Usage
Possible factors causing unstable plasma are high or unstable dielectric loss of ceramic members.
A995LD with ceramic stably-maintained low dielectric loss can improve equipment performance in terms of:
- electric power saving due to reduced power loss;
- rate stabilization;
- tuning work saving; and
- plasma dispersion prevention.
Product Lineup Chart
Type | Characteristics | Characteristics | Usage |
---|---|---|---|
Standard product | Large shape allowed Relatively inexpensive |
A995 | ・Members for various semiconductor manufacturing devices ・Large components for various liquid crystal devices ・Large abrasion-resistant parts for machines such as a mill, grinder, pulverizer, and crusher |
Low-dielectric loss type | Low-dielectric loss | A995LD | ・Plasma devices for semiconductor manufacturing |
Thermal shock residence type | Thermal shock residence High toughness |
A995S | ・Carrier parts for heat-treating process ・Heater peripheral members |
High-purity type | High-purity Pore-free |
AJPF | ・Plasma devices for semiconductor manufacturing |